Facility & Equipment Details
Description
FE-SEM, Schottky Emitter, High Vacuum or Variable pressure mode available
Multiple detectors available: InLens Duo(SE and BSE), SE2, VPSE
Capella FIB column with Ga-Liquid metal ion source
Voltage range:0.02KV-30kV, Probe Current range: 5pA-100nA, 1.9nm@1KV/1.0nm@15KV
Equipped with Micromanipulator, capable of TEM lamellas specimen preparation
Equipped Gas Injection System of Platinum precursor
Equipped with Oxford EDAX and EBSD detectors
Equipped with Leica cryo system
Equipped with Atlas5, a powerful integrated software, capable of 3D tomography imaging and nano-patterning process
Multiple detectors available: InLens Duo(SE and BSE), SE2, VPSE
Capella FIB column with Ga-Liquid metal ion source
Voltage range:0.02KV-30kV, Probe Current range: 5pA-100nA, 1.9nm@1KV/1.0nm@15KV
Equipped with Micromanipulator, capable of TEM lamellas specimen preparation
Equipped Gas Injection System of Platinum precursor
Equipped with Oxford EDAX and EBSD detectors
Equipped with Leica cryo system
Equipped with Atlas5, a powerful integrated software, capable of 3D tomography imaging and nano-patterning process
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