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Dive into the research topics where Chang-Yong Nam is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Collaborations and top research areas from the last five years
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Development of VPI Process for High-NA EUV C/H CD Shrinkage and CDU Improvement
Nam, C.-Y. (PI)
10/1/24 → 12/14/26
Project: Research
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Routing Design Guided Development of 3D Scaling BEOL Interconnect Technology
Nam, C.-Y. (PI)
Pohang University of Science and Technology
04/1/23 → 06/30/27
Project: Research
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Development of Mass Production Technology and Systems for Boron Nitride Nanotubes used for Space Engineering
Kim, T. J. (PI) & Nam, C.-Y. (CoPI)
06/1/22 → 09/30/26
Project: Research
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Novel Organic-Inorganic Hybrid EUV Dry Resists Deposited by Molecular Atomic Layer Deposition (MALD)
Nam, C.-Y. (PI)
01/1/21 → 12/31/23
Project: Research
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Achieving ultrahigh modulus of resilience and enhanced thermal stability in ZnOx/SU-8 interpenetrating network polymernanocomposite nanopillars
Li, Z., Lee, W. I., Tiwale, N., Wade, K. P., Aindow, M., Nam, C. Y. & Lee, S. W., Mar 2026, In: Materials and Design. 263, 115577.Research output: Contribution to journal › Article › peer-review
Open Access -
Alumina Priming-Mediated Enhanced Binding of Diethylzinc with Carbonyl Groups in Poly(Methyl Methacrylate) during Vapor-Phase Infiltration
Tiwale, N., Subramanian, A., Sikder, S., Qu, X., Freychet, G., Gann, E., Jaye, C., Kisslinger, K., Boscoboinik, J. A. & Nam, C. Y., Feb 24 2026, In: Chemistry of Materials. 38, 4, p. 1751-1765 15 p.Research output: Contribution to journal › Article › peer-review
Open Access -
Coupled Roles of Surface Chemistry and Hydrogen-Assisted Cycling in Ruthenium Atomic Layer Deposition on Silicon Oxides
Ha, S., Oh, H., Lee, W. I., Chowdhury, M. I., Tong, X., Liu, M. & Nam, C. Y., May 19 2026, In: ACS Omega. 11, 19, p. 28300-28312 13 p.Research output: Contribution to journal › Article › peer-review
Open Access -
Integrated Strategies for Overcoming Resolution Limits in Electron Beam Lithography of Chemically Amplified Resists
Wu, X., Tiwale, N., Stein, A. & Nam, C. Y., Feb 18 2026, In: ACS Applied Materials and Interfaces. 18, 6, p. 10261-10269 9 p.Research output: Contribution to journal › Article › peer-review
Open Access -
Mechanism of Vapor-Phase Infiltration of Organometallic Hf in Poly(Methyl Methacrylate) for Hybrid Resist Applications
Chowdhury, M. I., Wu, X., Lee, W. I., Sun, P., Ahmad, M., Kisslinger, K., Sadowski, J. T., Tenney, S. A., Boscoboinik, J. A., Tiwale, N. & Nam, C. Y., Feb 24 2026, In: Chemistry of Materials. 38, 4, p. 1715-1726 12 p.Research output: Contribution to journal › Article › peer-review
Open Access