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Defect Mapping in 4H-SiC Wafers, Epilayers and High Voltage Diodes in Support of Spatial Correlation of Defects and Reverse Leakage in High Voltage SiC Diodes

Project: Research

Project Details

StatusFinished
Effective start/end date05/1/10 → 09/30/11

Funding

  • US Army Research Laboratory: $70,000.00