Project Details
| Status | Active |
|---|---|
| Effective start/end date | 10/1/24 → 12/14/26 |
Funding
- Samsung Electronics Co LTD: $240,000.00
Development of VPI Process for High-NA EUV C/H CD Shrinkage and CDU Improvement
- Nam, Chang-Yong (PI)
Project: Research
Project: Research
| Status | Active |
|---|---|
| Effective start/end date | 10/1/24 → 12/14/26 |