Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 01/18/22 → 04/2/24 |
Funding
- Multiple Sponsors: $56,259.61
SAMRI Award: UV Augmented Fluoridation of YF3 Plasma Etch Chamber Coatings
- Clayton, Clive R (PI)
- Hwang, David J (CoPI)
Project: Research