3D sensors and micro-fabricated detector systems

Cinzia Da Vià

doi:10.1016/j.nima.2014.05.087

3D sensors and micro-fabricated detector systems

Cinzia Da Vià

Physics and Astronomy

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

Micro-systems based on the Micro Electro Mechanical Systems (MEMS) technology have been used in miniaturized low power and low mass smart structures in medicine, biology and space applications. Recently similar features found their way inside high energy physics with applications in vertex detectors for high-luminosity LHC Upgrades, with 3D sensors, 3D integration and efficient power management using silicon micro-channel cooling. This paper reports on the state of this development.

Original language	English
Pages (from-to)	151-154
Number of pages	4
Journal	Nuclear Inst. and Methods in Physics Research, A
Volume	765
DOIs	https://doi.org/10.1016/j.nima.2014.05.087
State	Published - Nov 21 2014

Keywords

3D integration
3D printing
3D silicon sensor
ATLAS pixel upgrade
FE-I4
LHC upgrade
MEMS
Pixels
Radiation hardness. Micro-channel-cooling

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10.1016/j.nima.2014.05.087

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title = "3D sensors and micro-fabricated detector systems",

abstract = "Micro-systems based on the Micro Electro Mechanical Systems (MEMS) technology have been used in miniaturized low power and low mass smart structures in medicine, biology and space applications. Recently similar features found their way inside high energy physics with applications in vertex detectors for high-luminosity LHC Upgrades, with 3D sensors, 3D integration and efficient power management using silicon micro-channel cooling. This paper reports on the state of this development.",

keywords = "3D integration, 3D printing, 3D silicon sensor, ATLAS pixel upgrade, FE-I4, LHC upgrade, MEMS, Pixels, Radiation hardness. Micro-channel-cooling",

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AB - Micro-systems based on the Micro Electro Mechanical Systems (MEMS) technology have been used in miniaturized low power and low mass smart structures in medicine, biology and space applications. Recently similar features found their way inside high energy physics with applications in vertex detectors for high-luminosity LHC Upgrades, with 3D sensors, 3D integration and efficient power management using silicon micro-channel cooling. This paper reports on the state of this development.

KW - 3D integration

KW - 3D printing

KW - 3D silicon sensor

KW - ATLAS pixel upgrade

KW - FE-I4

KW - LHC upgrade

KW - MEMS

KW - Pixels

KW - Radiation hardness. Micro-channel-cooling

UR - https://www.scopus.com/pages/publications/84908364347

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DO - 10.1016/j.nima.2014.05.087

M3 - Article

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VL - 765

SP - 151

EP - 154

JO - Nuclear Inst. and Methods in Physics Research, A

JF - Nuclear Inst. and Methods in Physics Research, A

ER -

3D sensors and micro-fabricated detector systems

Abstract

Keywords

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