3D silicon detectors - Status and applications

C. Davia; J. Hasi; C. Kenney; A. Kok; S. Parker

doi:10.1016/j.nima.2005.04.037

3D silicon detectors - Status and applications

C. Davia
, J. Hasi
, C. Kenney
, A. Kok
, S. Parker

Physics and Astronomy

Brunel University London
Stanford University
University of Hawai'i at Mānoa

Research output: Contribution to journal › Conference article › peer-review

28 Scopus citations

Abstract

3D silicon technology is a new way to make silicon detectors using Micro-Electro-Mechanical-Systems (MEMS) processing. In this innovative design the electrodes penetrate through the silicon bulk perpendicular to the surface. Two types of device have been developed - 3D and planar 3D. Both use an edge electrode that eliminates the need for guard rings and provides sensitivity to within a few microns of the edge. 3D technology and its advantages are reviewed and examples of the two types of device are shown.

Original language	English
Pages (from-to)	122-125
Number of pages	4
Journal	Nuclear Inst. and Methods in Physics Research, A
Volume	549
Issue number	1-3
DOIs	https://doi.org/10.1016/j.nima.2005.04.037
State	Published - Sep 1 2005
Event	VERTEX 2003 - Duration: Sep 14 2003 → Sep 19 2003

Keywords

3D detector
Active edge
Planar 3D

Access to Document

10.1016/j.nima.2005.04.037

Cite this

@article{31d65adc7b7744e98aa1f9d8e6e6c211,

title = "3D silicon detectors - Status and applications",

abstract = "3D silicon technology is a new way to make silicon detectors using Micro-Electro-Mechanical-Systems (MEMS) processing. In this innovative design the electrodes penetrate through the silicon bulk perpendicular to the surface. Two types of device have been developed - 3D and planar 3D. Both use an edge electrode that eliminates the need for guard rings and provides sensitivity to within a few microns of the edge. 3D technology and its advantages are reviewed and examples of the two types of device are shown.",

keywords = "3D detector, Active edge, Planar 3D",

author = "C. Davia and J. Hasi and C. Kenney and A. Kok and S. Parker",

year = "2005",

month = sep,

day = "1",

doi = "10.1016/j.nima.2005.04.037",

language = "English",

volume = "549",

pages = "122--125",

journal = "Nuclear Inst. and Methods in Physics Research, A",

issn = "0168-9002",

number = "1-3",

note = "VERTEX 2003 ; Conference date: 14-09-2003 Through 19-09-2003",

}

TY - JOUR

T1 - 3D silicon detectors - Status and applications

AU - Davia, C.

AU - Hasi, J.

AU - Kenney, C.

AU - Kok, A.

AU - Parker, S.

PY - 2005/9/1

Y1 - 2005/9/1

N2 - 3D silicon technology is a new way to make silicon detectors using Micro-Electro-Mechanical-Systems (MEMS) processing. In this innovative design the electrodes penetrate through the silicon bulk perpendicular to the surface. Two types of device have been developed - 3D and planar 3D. Both use an edge electrode that eliminates the need for guard rings and provides sensitivity to within a few microns of the edge. 3D technology and its advantages are reviewed and examples of the two types of device are shown.

AB - 3D silicon technology is a new way to make silicon detectors using Micro-Electro-Mechanical-Systems (MEMS) processing. In this innovative design the electrodes penetrate through the silicon bulk perpendicular to the surface. Two types of device have been developed - 3D and planar 3D. Both use an edge electrode that eliminates the need for guard rings and provides sensitivity to within a few microns of the edge. 3D technology and its advantages are reviewed and examples of the two types of device are shown.

KW - 3D detector

KW - Active edge

KW - Planar 3D

UR - https://www.scopus.com/pages/publications/31644439644

U2 - 10.1016/j.nima.2005.04.037

DO - 10.1016/j.nima.2005.04.037

M3 - Conference article

AN - SCOPUS:31644439644

SN - 0168-9002

VL - 549

SP - 122

EP - 125

JO - Nuclear Inst. and Methods in Physics Research, A

JF - Nuclear Inst. and Methods in Physics Research, A

IS - 1-3

T2 - VERTEX 2003

Y2 - 14 September 2003 through 19 September 2003

ER -

3D silicon detectors - Status and applications

Abstract

Keywords

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