A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications

Huikai Xie; Ankur Jain; Tuqiang Xie; Yingtian Pan; Gary K. Fedder

A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications

Huikai Xie
, Ankur Jain
, Tuqiang Xie
, Yingtian Pan
, Gary K. Fedder

Biomedical Engineering

University of Florida
Stony Brook University
Carnegie Mellon University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Scopus citations

Abstract

This paper reports a single-crystalline silicon (SCS)-based micromirror with large scanning angle (up to 31°) which can be used for biomedical imaging. The micromirror is fabricated by using a deep reactive-ion-etch (DRIE) post-CMOS micromachining process. Thin bimorph actuation structures and movable bulk silicon structures are simultaneously achieved. The micromirror is 1 mm by 1 mm in size, coated with aluminum, and thermally actuated by an integrated polysilicon heater. The radius of curvature of the mirror surface is about 50 cm. The mirror rotates 31° at 9 mA. The resonant frequency of the device is 380 Hz.

Original language	English
Title of host publication	Conference on Lasers and Electro-Optics, CLEO 2003
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Electronic)	1557527334
State	Published - 2003
Event	Conference on Lasers and Electro-Optics, CLEO 2003 - Baltimore, United States Duration: Jun 1 2003 → Jun 6 2003

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Conference

Conference	Conference on Lasers and Electro-Optics, CLEO 2003
Country/Territory	United States
City	Baltimore
Period	06/1/03 → 06/6/03

Cite this

@inproceedings{81f579c8e49f4b67b538bb8f0166260e,

title = "A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications",

abstract = "This paper reports a single-crystalline silicon (SCS)-based micromirror with large scanning angle (up to 31°) which can be used for biomedical imaging. The micromirror is fabricated by using a deep reactive-ion-etch (DRIE) post-CMOS micromachining process. Thin bimorph actuation structures and movable bulk silicon structures are simultaneously achieved. The micromirror is 1 mm by 1 mm in size, coated with aluminum, and thermally actuated by an integrated polysilicon heater. The radius of curvature of the mirror surface is about 50 cm. The mirror rotates 31° at 9 mA. The resonant frequency of the device is 380 Hz.",

author = "Huikai Xie and Ankur Jain and Tuqiang Xie and Yingtian Pan and Fedder, \{Gary K.\}",

note = "Publisher Copyright: {\textcopyright} 2003 OSA/CLEO 2003.; Conference on Lasers and Electro-Optics, CLEO 2003 ; Conference date: 01-06-2003 Through 06-06-2003",

year = "2003",

language = "English",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "Conference on Lasers and Electro-Optics, CLEO 2003",

}

Xie, H, Jain, A, Xie, T, Pan, Y & Fedder, GK 2003, A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications. in Conference on Lasers and Electro-Optics, CLEO 2003., CTuW1, Optics InfoBase Conference Papers, Optica Publishing Group (formerly OSA), Conference on Lasers and Electro-Optics, CLEO 2003, Baltimore, United States, 06/1/03.

A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications. / Xie, Huikai; Jain, Ankur; Xie, Tuqiang et al.
Conference on Lasers and Electro-Optics, CLEO 2003. Optica Publishing Group (formerly OSA), 2003. CTuW1 (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications

AU - Xie, Huikai

AU - Jain, Ankur

AU - Xie, Tuqiang

AU - Pan, Yingtian

AU - Fedder, Gary K.

PY - 2003

Y1 - 2003

N2 - This paper reports a single-crystalline silicon (SCS)-based micromirror with large scanning angle (up to 31°) which can be used for biomedical imaging. The micromirror is fabricated by using a deep reactive-ion-etch (DRIE) post-CMOS micromachining process. Thin bimorph actuation structures and movable bulk silicon structures are simultaneously achieved. The micromirror is 1 mm by 1 mm in size, coated with aluminum, and thermally actuated by an integrated polysilicon heater. The radius of curvature of the mirror surface is about 50 cm. The mirror rotates 31° at 9 mA. The resonant frequency of the device is 380 Hz.

AB - This paper reports a single-crystalline silicon (SCS)-based micromirror with large scanning angle (up to 31°) which can be used for biomedical imaging. The micromirror is fabricated by using a deep reactive-ion-etch (DRIE) post-CMOS micromachining process. Thin bimorph actuation structures and movable bulk silicon structures are simultaneously achieved. The micromirror is 1 mm by 1 mm in size, coated with aluminum, and thermally actuated by an integrated polysilicon heater. The radius of curvature of the mirror surface is about 50 cm. The mirror rotates 31° at 9 mA. The resonant frequency of the device is 380 Hz.

UR - https://www.scopus.com/pages/publications/32644435595

M3 - Conference contribution

AN - SCOPUS:32644435595

T3 - Optics InfoBase Conference Papers

BT - Conference on Lasers and Electro-Optics, CLEO 2003

PB - Optica Publishing Group (formerly OSA)

T2 - Conference on Lasers and Electro-Optics, CLEO 2003

Y2 - 1 June 2003 through 6 June 2003

ER -

A Single-Crystal Silicon-Based Micromirror with Large Scanning Angle for Biomedical Applications

Abstract

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