@inproceedings{c42d411524a4450c825a8b80000d73c9,
title = "Analysis of IC Manufacturing Process Deformations: An Automated Approach Using SRAM Bit Fail Maps",
abstract = "SRAM bit fail maps (BFM) are routinely collected during earlier phases of yield ramping, providing a rich source of information for IC failure and deformation learning. In this paper, we present an automated approach to analyzing BFM data efficiently. We also demonstrate the usability of our analysis framework using real BFM test data from a large, modern SRAM test vehicle.",
author = "T. Zanon and M. Ferdman and K. Komeyli and W. Maly",
note = "Publisher Copyright: {\textcopyright} 2003 ASM International. All rights reserved.; 29th International Symposium for Testing and Failure Analysis, ISTFA 2003 ; Conference date: 02-11-2003 Through 06-11-2003",
year = "2003",
doi = "10.31399/asm.cp.istfa2003p0232",
language = "English",
series = "Conference Proceedings from the International Symposium for Testing and Failure Analysis",
publisher = "ASM International",
pages = "232--241",
booktitle = "ISTFA 2003",
}