@inproceedings{6e116b93b47b4ab49e9034d1382cd9a7,
title = "Atomic nanofabrication of periodic structures",
abstract = "Metastable helium has 20 eV of internal energy that destroys a resist assembled on a wafer. An optical standing wave was used to channel and focus the He* atoms into lines separated by λ /2.",
author = "Claire Allred and Jason Reeves and Christopher Corder and Harold Metcalf",
year = "2009",
doi = "10.1364/iqec.2009.ipda2",
language = "English",
isbn = "9781557528698",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America (OSA)",
booktitle = "International Quantum Electronics Conference, IQEC 2009",
note = "International Quantum Electronics Conference, IQEC 2009 ; Conference date: 31-05-2009 Through 05-06-2009",
}