Automated markerless full field hard x-ray microscopic tomography at sub-50 nm 3-dimension spatial resolution

Jun Wang; Yu Chen Karen Chen; Qingxi Yuan; Andrei Tkachuk; Can Erdonmez; Benjamin Hornberger; Michael Feser

doi:10.1063/1.3701579

Automated markerless full field hard x-ray microscopic tomography at sub-50 nm 3-dimension spatial resolution

Jun Wang
, Yu Chen Karen Chen
, Qingxi Yuan
, Andrei Tkachuk
, Can Erdonmez
, Benjamin Hornberger
, Michael Feser

Materials Science and Engineering

Brookhaven National Laboratory
XRADIA Inc.

Research output: Contribution to journal › Article › peer-review

101 Scopus citations

Abstract

A full field transmission x-ray microscope (TXM) has been developed and commissioned at the National Synchrotron Light Source at Brookhaven National Laboratory. The capabilities we developed in auto-tomography, local tomography, and spectroscopic imaging that overcome many of the limitations and difficulties in existing transmission x-ray microscopes are described and experimentally demonstrated. Sub-50 nm resolution in 3-dimension (3D) with markerless automated tomography has been achieved. These capabilities open up scientific opportunities in many research fields.

Original language	English
Article number	143107
Journal	Applied Physics Letters
Volume	100
Issue number	14
DOIs	https://doi.org/10.1063/1.3701579
State	Published - Apr 2 2012

Access to Document

10.1063/1.3701579

Cite this

@article{6e9235336b1f4971abda74a268246b63,

title = "Automated markerless full field hard x-ray microscopic tomography at sub-50 nm 3-dimension spatial resolution",

abstract = "A full field transmission x-ray microscope (TXM) has been developed and commissioned at the National Synchrotron Light Source at Brookhaven National Laboratory. The capabilities we developed in auto-tomography, local tomography, and spectroscopic imaging that overcome many of the limitations and difficulties in existing transmission x-ray microscopes are described and experimentally demonstrated. Sub-50 nm resolution in 3-dimension (3D) with markerless automated tomography has been achieved. These capabilities open up scientific opportunities in many research fields.",

author = "Jun Wang and \{Karen Chen\}, \{Yu Chen\} and Qingxi Yuan and Andrei Tkachuk and Can Erdonmez and Benjamin Hornberger and Michael Feser",

year = "2012",

month = apr,

day = "2",

doi = "10.1063/1.3701579",

language = "English",

volume = "100",

journal = "Applied Physics Letters",

issn = "0003-6951",

number = "14",

}

TY - JOUR

T1 - Automated markerless full field hard x-ray microscopic tomography at sub-50 nm 3-dimension spatial resolution

AU - Wang, Jun

AU - Karen Chen, Yu Chen

AU - Yuan, Qingxi

AU - Tkachuk, Andrei

AU - Erdonmez, Can

AU - Hornberger, Benjamin

AU - Feser, Michael

PY - 2012/4/2

Y1 - 2012/4/2

N2 - A full field transmission x-ray microscope (TXM) has been developed and commissioned at the National Synchrotron Light Source at Brookhaven National Laboratory. The capabilities we developed in auto-tomography, local tomography, and spectroscopic imaging that overcome many of the limitations and difficulties in existing transmission x-ray microscopes are described and experimentally demonstrated. Sub-50 nm resolution in 3-dimension (3D) with markerless automated tomography has been achieved. These capabilities open up scientific opportunities in many research fields.

AB - A full field transmission x-ray microscope (TXM) has been developed and commissioned at the National Synchrotron Light Source at Brookhaven National Laboratory. The capabilities we developed in auto-tomography, local tomography, and spectroscopic imaging that overcome many of the limitations and difficulties in existing transmission x-ray microscopes are described and experimentally demonstrated. Sub-50 nm resolution in 3-dimension (3D) with markerless automated tomography has been achieved. These capabilities open up scientific opportunities in many research fields.

UR - https://www.scopus.com/pages/publications/84859802569

U2 - 10.1063/1.3701579

DO - 10.1063/1.3701579

M3 - Article

AN - SCOPUS:84859802569

SN - 0003-6951

VL - 100

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 14

M1 - 143107

ER -

Automated markerless full field hard x-ray microscopic tomography at sub-50 nm 3-dimension spatial resolution

Abstract

Access to Document

Other files and links

Fingerprint

Cite this