Abstract
An initial study into the impact of elementary screw dislocations on the reverse-bias current-voltage characteristics of 4H-SiC p+n diodes is described. Most devices without screw dislocations exhibited excellent characteristics, with no detectable leakage current prior to breakdown, a sharp breakdown current-voltage characteristics knee, and no visible microplasmas in which highly localized breakdown current is concentrated. The locations of observed breakdown microplasmas corresponded exactly to the locations of elementary screw dislocations identified synchrotron white beam X ray topography mapping.
| Original language | English |
|---|---|
| Pages (from-to) | 285-294 |
| Number of pages | 10 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 483 |
| DOIs | |
| State | Published - 1997 |
| Event | Proceedings of the 1997 Fall MRS Symposium - Boston, MA, USA Duration: Dec 1 1997 → Dec 4 1997 |
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