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Characterization of 100 mm diameter 4H-Silicon carbide crystals with extremely low basal plane dislocation density

  • Stony Brook University
  • Dow Chemical

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

21 Scopus citations

Abstract

Synchrotron White Beam X-ray Topography (SWBXT) studies are presented of basal plane dislocation (BPD) configurations and behavior in a new generation of 100mm diameter, 4HSiC wafers with extremely low BPD densities (3-4 × 102 cm-2). The conversion of non-screw oriented, glissile BPDs into sessile threading edge dislocations (TEDs) is observed to provide pinning points for the operation of single ended Frank-Read sources. In some regions, once converted TEDs are observed to re-convert back into BPDs in a repetitive process which provides multiple BPD pinning points.

Original languageEnglish
Title of host publicationSilicon Carbide and Related Materials 2009
Subtitle of host publicationICSCRM 2009
PublisherTrans Tech Publications Ltd
Pages291-294
Number of pages4
ISBN (Print)0878492798, 9780878492794
DOIs
StatePublished - 2010
Event13th International Conference on Silicon Carbide and Related Materials 2009, ICSCRM 2009 - Nurnberg, Germany
Duration: Oct 11 2009Oct 16 2009

Publication series

NameMaterials Science Forum
Volume645-648
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Conference

Conference13th International Conference on Silicon Carbide and Related Materials 2009, ICSCRM 2009
Country/TerritoryGermany
CityNurnberg
Period10/11/0910/16/09

Keywords

  • Basal plane dislocation
  • Frank-Read source
  • Glissile
  • Pinning point
  • Sessile

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