Abstract
Various numerical simulations for liquid encapsulated Czochralski (LEC) growth have been performed for many different process conditions, but they have generally neglected convective flows in the gas. A comprehensive model has been developed to account for oscillatory, laminar and turbulent flows caused by buoyancy and surface tension forces; forced convection due to crucible and crystal rotations; and complex thermal boundary conditions. The model also accounts for magnetohydrodynamics and sophisticated radiation heat exchange. Thermal elastic stress in the crystal is simultaneously calculated using the temperature distribution and crystal/metal interface shape obtained from the thermal transport simulation.
| Original language | English |
|---|---|
| Pages (from-to) | 39-42 |
| Number of pages | 4 |
| Journal | Conference Proceedings - International Conference on Indium Phosphide and Related Materials |
| State | Published - 1996 |
| Event | Proceedings of the 1996 8th International Conference on Indium Phosphide and Related Materials - Schwabisch Gmund, Ger Duration: Apr 21 1996 → Apr 25 1996 |
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