Correlation between nanomechanical and piezoelectric properties of thin films: An experimental and finite element study

Hussein Nili; Guang Cheng; T. A. Venkatesh; Sharath Sriram; Madhu Bhaskaran

doi:10.1016/j.matlet.2012.09.036

Correlation between nanomechanical and piezoelectric properties of thin films: An experimental and finite element study

Hussein Nili
, Guang Cheng
, T. A. Venkatesh
, Sharath Sriram
, Madhu Bhaskaran

Materials Science and Engineering

Royal Melbourne Institute of Technology University
Stony Brook University

Research output: Contribution to journal › Article › peer-review

19 Scopus citations

Abstract

Piezoelectric materials perform mechanical-to-electrical energy conversion and have unique and enhanced properties, particularly in the thin film form. In this work, the nanomechanical properties of strontium-doped lead zirconate titanate thin films are investigated by nanoindentation. Finite element modeling of the nanoindentation process allows for a comparison of the simulated and experimentally measured load-displacement curves. New insights correlating the nanomechanical and piezoelectric properties of thin films have been obtained which will enable more efficient design of piezoelectric energy harvesting devices.

Original language	English
Pages (from-to)	148-151
Number of pages	4
Journal	Materials Letters
Volume	90
DOIs	https://doi.org/10.1016/j.matlet.2012.09.036
State	Published - Jan 2013

Keywords

Elastic modulus
Instrumented indentation method (IIM)
Nanoindentation
Piezoelectric response
Thin films

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10.1016/j.matlet.2012.09.036

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abstract = "Piezoelectric materials perform mechanical-to-electrical energy conversion and have unique and enhanced properties, particularly in the thin film form. In this work, the nanomechanical properties of strontium-doped lead zirconate titanate thin films are investigated by nanoindentation. Finite element modeling of the nanoindentation process allows for a comparison of the simulated and experimentally measured load-displacement curves. New insights correlating the nanomechanical and piezoelectric properties of thin films have been obtained which will enable more efficient design of piezoelectric energy harvesting devices.",

keywords = "Elastic modulus, Instrumented indentation method (IIM), Nanoindentation, Piezoelectric response, Thin films",

author = "Hussein Nili and Guang Cheng and Venkatesh, \{T. A.\} and Sharath Sriram and Madhu Bhaskaran",

year = "2013",

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doi = "10.1016/j.matlet.2012.09.036",

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T1 - Correlation between nanomechanical and piezoelectric properties of thin films

T2 - An experimental and finite element study

AU - Nili, Hussein

AU - Cheng, Guang

AU - Venkatesh, T. A.

AU - Sriram, Sharath

AU - Bhaskaran, Madhu

PY - 2013/1

Y1 - 2013/1

N2 - Piezoelectric materials perform mechanical-to-electrical energy conversion and have unique and enhanced properties, particularly in the thin film form. In this work, the nanomechanical properties of strontium-doped lead zirconate titanate thin films are investigated by nanoindentation. Finite element modeling of the nanoindentation process allows for a comparison of the simulated and experimentally measured load-displacement curves. New insights correlating the nanomechanical and piezoelectric properties of thin films have been obtained which will enable more efficient design of piezoelectric energy harvesting devices.

AB - Piezoelectric materials perform mechanical-to-electrical energy conversion and have unique and enhanced properties, particularly in the thin film form. In this work, the nanomechanical properties of strontium-doped lead zirconate titanate thin films are investigated by nanoindentation. Finite element modeling of the nanoindentation process allows for a comparison of the simulated and experimentally measured load-displacement curves. New insights correlating the nanomechanical and piezoelectric properties of thin films have been obtained which will enable more efficient design of piezoelectric energy harvesting devices.

KW - Elastic modulus

KW - Instrumented indentation method (IIM)

KW - Nanoindentation

KW - Piezoelectric response

KW - Thin films

UR - https://www.scopus.com/pages/publications/84870702678

U2 - 10.1016/j.matlet.2012.09.036

DO - 10.1016/j.matlet.2012.09.036

M3 - Article

AN - SCOPUS:84870702678

SN - 0167-577X

VL - 90

SP - 148

EP - 151

JO - Materials Letters

JF - Materials Letters

ER -

Correlation between nanomechanical and piezoelectric properties of thin films: An experimental and finite element study

Abstract

Keywords

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