TY - GEN
T1 - Crystal growth and defect characterization of AlN single crystals
AU - Wang, Shaoping
AU - Raghothamachar, Balaji
AU - Dudley, Michael
AU - Timmerman, Andrew G.
PY - 2006
Y1 - 2006
N2 - In this paper, we report results from seeded AlN PVT growth experiments carried out using (0001) carbon-face SiC seeds. The purpose of the experiments was to understand the morphology and crystalline quality of AlN thick films grown under the crystal growth environments investigated. AlN single crystal films of 100-650μm in thickness were grown and freestanding AlN single crystal pieces up to 4×5mm2 were obtained. Surface morphologies and crystal defects in these AlN single crystals were studied using optical microscopy. Selected AlN single crystals were studied using a high-resolution triple-axis X-ray diffraction technique and a Synchrotron White Beam X-ray Diffraction Topography technique. Defects identified in AlN crystals are cracks, grain boundaries and crystallite inclusions.
AB - In this paper, we report results from seeded AlN PVT growth experiments carried out using (0001) carbon-face SiC seeds. The purpose of the experiments was to understand the morphology and crystalline quality of AlN thick films grown under the crystal growth environments investigated. AlN single crystal films of 100-650μm in thickness were grown and freestanding AlN single crystal pieces up to 4×5mm2 were obtained. Surface morphologies and crystal defects in these AlN single crystals were studied using optical microscopy. Selected AlN single crystals were studied using a high-resolution triple-axis X-ray diffraction technique and a Synchrotron White Beam X-ray Diffraction Topography technique. Defects identified in AlN crystals are cracks, grain boundaries and crystallite inclusions.
UR - https://www.scopus.com/pages/publications/33646456480
M3 - Conference contribution
AN - SCOPUS:33646456480
SN - 1558998462
SN - 9781558998469
T3 - Materials Research Society Symposium Proceedings
SP - 775
EP - 780
BT - Materials Research Society Symposium Proceedings
T2 - 2005 Materials Research Society Fall Meeting
Y2 - 28 November 2005 through 2 December 2005
ER -