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Crystal growth and defect characterization of AlN single crystals

  • Fairfield Crystal Technology, LLC

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

In this paper, we report results from seeded AlN PVT growth experiments carried out using (0001) carbon-face SiC seeds. The purpose of the experiments was to understand the morphology and crystalline quality of AlN thick films grown under the crystal growth environments investigated. AlN single crystal films of 100-650μm in thickness were grown and freestanding AlN single crystal pieces up to 4×5mm2 were obtained. Surface morphologies and crystal defects in these AlN single crystals were studied using optical microscopy. Selected AlN single crystals were studied using a high-resolution triple-axis X-ray diffraction technique and a Synchrotron White Beam X-ray Diffraction Topography technique. Defects identified in AlN crystals are cracks, grain boundaries and crystallite inclusions.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
Pages775-780
Number of pages6
StatePublished - 2006
Event2005 Materials Research Society Fall Meeting - Boston, MA, United States
Duration: Nov 28 2005Dec 2 2005

Publication series

NameMaterials Research Society Symposium Proceedings
Volume892
ISSN (Print)0272-9172

Conference

Conference2005 Materials Research Society Fall Meeting
Country/TerritoryUnited States
CityBoston, MA
Period11/28/0512/2/05

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