@inproceedings{49f753744da241fdbdb430a73922c26a,
title = "Direct determination of burgers vectors of threading mixed dislocations in 4h-SiC c-plane wafers grown By PVT method",
abstract = "A systematic method is developed and demonstrated here to determine the Burgers vectors of threading mixed dislocations in 4H-SiC c-plane offcut wafers grown by PVT method. Both Synchrotron Monochromatic X-ray Topography and Ray Tracing Simulations are used in this method. Measurements confirm that in a commercial offcut wafer the majority of the threading dislocations with screw component are actually mixed type dislocations.",
author = "J. Guo and Y. Yang and F. Wu and Goue, \{O. Y.\} and B. Raghothamachar and M. Dudley",
note = "Publisher Copyright: {\textcopyright} The Electrochemical Society.; Symposium on GaN and SiC Power Technologies 5 - 228th ECS Meeting ; Conference date: 11-10-2015 Through 15-10-2015",
year = "2015",
doi = "10.1149/06911.0033ecst",
language = "English",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "11",
pages = "33--38",
editor = "K. Shenai and M. Dudley and N. Ohtani and M. Bakowski",
booktitle = "GaN and SiC Power Technologies 5",
edition = "11",
}