Direct-write thermal spray for sensors and electronics: An overview

This paper provides an overview of Direct-Write Thermal Spray (DWTS), an emerging technology under development for nearly a decade at Stony Brook and MesoScribe Technologies, Inc. DWTS is a direct-write fabrication technology that provides material versatility, no need for post-firing or curing, fast deposition rates, and feature sizes from centimeters to several tens of microns, particularly when used with laser micromachining. Metals, dielectrics, polymers, and even semiconductor materials can be deposited. Applications include sensors for harsh environments such as thermocouples, heat flux sensors, and resistive and capacitive strain gauges; passive electronics, including planar capacitors, inductors, transformers and multi-layer structures; and technologies for RF and wireless sensor applications. The paper concludes with observations on future directions and applications.