Effect of the evaporation temperature of an organic precursor on the properties of silicon containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition (IBAD)

C. R. Clayton; M. E. Monserrat; G. P. Halada

Effect of the evaporation temperature of an organic precursor on the properties of silicon containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition (IBAD)

C. R. Clayton
, M. E. Monserrat
, G. P. Halada

Materials Science and Engineering

Stony Brook University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

Hard, adherent, and low friction amorphous silicon containing diamond-like carbon coatings (Si-DLC) have been synthesized both by 40 keV and 2.5 keV Ar+ ion beam assisted deposition (IBAD) of a tetraphenyl-tetramethyl-trisiloxane (C₆H₅)₄(CH₃)₄Si₃O₂ oil onto silicon wafer substrates. The sp³/sp² bonding ratio of the coatings was investigated with the aid of Fourier Transform Infrared (FTIR) Microspectroscopy and Valence Band X-ray Photoelectron Spectroscopy (XPS). In addition, the effect of the oil evaporation rate on film morphology will also be discussed.

Original language	English
Title of host publication	Proceedings of the International Conference on Ion Implantation Technology
Publisher	IEEE
Pages	885-888
Number of pages	4
ISBN (Print)	078034538X
State	Published - 1999
Event	Proceedings of the 1998 International Conference on 'Ion Implantation Technology' Proceedings (IIT'98) - Kyoto, Jpn Duration: Jun 22 1998 → Jun 26 1998

Publication series

Name	Proceedings of the International Conference on Ion Implantation Technology
Volume	2

Conference

Conference	Proceedings of the 1998 International Conference on 'Ion Implantation Technology' Proceedings (IIT'98)
City	Kyoto, Jpn
Period	06/22/98 → 06/26/98

Cite this

Clayton, C. R., Monserrat, M. E., & Halada, G. P. (1999). Effect of the evaporation temperature of an organic precursor on the properties of silicon containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition (IBAD). In Proceedings of the International Conference on Ion Implantation Technology (pp. 885-888). (Proceedings of the International Conference on Ion Implantation Technology; Vol. 2). IEEE.

Clayton, C. R. ; Monserrat, M. E. ; Halada, G. P. / Effect of the evaporation temperature of an organic precursor on the properties of silicon containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition (IBAD). Proceedings of the International Conference on Ion Implantation Technology. IEEE, 1999. pp. 885-888 (Proceedings of the International Conference on Ion Implantation Technology).

@inproceedings{a9418f035dc34d59941ebad9cc754281,

title = "Effect of the evaporation temperature of an organic precursor on the properties of silicon containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition (IBAD)",

abstract = "Hard, adherent, and low friction amorphous silicon containing diamond-like carbon coatings (Si-DLC) have been synthesized both by 40 keV and 2.5 keV Ar+ ion beam assisted deposition (IBAD) of a tetraphenyl-tetramethyl-trisiloxane (C6H5)4(CH3)4Si3O2 oil onto silicon wafer substrates. The sp3/sp2 bonding ratio of the coatings was investigated with the aid of Fourier Transform Infrared (FTIR) Microspectroscopy and Valence Band X-ray Photoelectron Spectroscopy (XPS). In addition, the effect of the oil evaporation rate on film morphology will also be discussed.",

author = "Clayton, \{C. R.\} and Monserrat, \{M. E.\} and Halada, \{G. P.\}",

year = "1999",

language = "English",

isbn = "078034538X",

series = "Proceedings of the International Conference on Ion Implantation Technology",

publisher = "IEEE",

pages = "885--888",

booktitle = "Proceedings of the International Conference on Ion Implantation Technology",

note = "Proceedings of the 1998 International Conference on 'Ion Implantation Technology' Proceedings (IIT'98) ; Conference date: 22-06-1998 Through 26-06-1998",

}

Clayton, CR, Monserrat, ME & Halada, GP 1999, Effect of the evaporation temperature of an organic precursor on the properties of silicon containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition (IBAD). in Proceedings of the International Conference on Ion Implantation Technology. Proceedings of the International Conference on Ion Implantation Technology, vol. 2, IEEE, pp. 885-888, Proceedings of the 1998 International Conference on 'Ion Implantation Technology' Proceedings (IIT'98), Kyoto, Jpn, 06/22/98.

Effect of the evaporation temperature of an organic precursor on the properties of silicon containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition (IBAD). / Clayton, C. R.; Monserrat, M. E.; Halada, G. P.
Proceedings of the International Conference on Ion Implantation Technology. IEEE, 1999. p. 885-888 (Proceedings of the International Conference on Ion Implantation Technology; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Effect of the evaporation temperature of an organic precursor on the properties of silicon containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition (IBAD)

AU - Clayton, C. R.

AU - Monserrat, M. E.

AU - Halada, G. P.

PY - 1999

Y1 - 1999

N2 - Hard, adherent, and low friction amorphous silicon containing diamond-like carbon coatings (Si-DLC) have been synthesized both by 40 keV and 2.5 keV Ar+ ion beam assisted deposition (IBAD) of a tetraphenyl-tetramethyl-trisiloxane (C6H5)4(CH3)4Si3O2 oil onto silicon wafer substrates. The sp3/sp2 bonding ratio of the coatings was investigated with the aid of Fourier Transform Infrared (FTIR) Microspectroscopy and Valence Band X-ray Photoelectron Spectroscopy (XPS). In addition, the effect of the oil evaporation rate on film morphology will also be discussed.

AB - Hard, adherent, and low friction amorphous silicon containing diamond-like carbon coatings (Si-DLC) have been synthesized both by 40 keV and 2.5 keV Ar+ ion beam assisted deposition (IBAD) of a tetraphenyl-tetramethyl-trisiloxane (C6H5)4(CH3)4Si3O2 oil onto silicon wafer substrates. The sp3/sp2 bonding ratio of the coatings was investigated with the aid of Fourier Transform Infrared (FTIR) Microspectroscopy and Valence Band X-ray Photoelectron Spectroscopy (XPS). In addition, the effect of the oil evaporation rate on film morphology will also be discussed.

UR - https://www.scopus.com/pages/publications/0033335801

M3 - Conference contribution

AN - SCOPUS:0033335801

SN - 078034538X

T3 - Proceedings of the International Conference on Ion Implantation Technology

SP - 885

EP - 888

BT - Proceedings of the International Conference on Ion Implantation Technology

PB - IEEE

T2 - Proceedings of the 1998 International Conference on 'Ion Implantation Technology' Proceedings (IIT'98)

Y2 - 22 June 1998 through 26 June 1998

ER -

Clayton CR, Monserrat ME, Halada GP. Effect of the evaporation temperature of an organic precursor on the properties of silicon containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition (IBAD). In Proceedings of the International Conference on Ion Implantation Technology. IEEE. 1999. p. 885-888. (Proceedings of the International Conference on Ion Implantation Technology).

Effect of the evaporation temperature of an organic precursor on the properties of silicon containing diamond-like carbon (Si-DLC) coatings synthesized by ion beam assisted deposition (IBAD)

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