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Experimental investigation of nanoscale thermal transport in hotspots at cryogenic temperatures

  • University of Wisconsin-Madison
  • IBM
  • iCONA Technology
  • Stanford University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

A scaling study of "localized heating effect" or ballistic phonon transport at cryogenic temperature in crystalline silicon is reported using electrical Joule heating and thermometry of patterned platinum nanoheaters. The thermal resistances of nanoheaters with width ranging from 100 nm up to 5000 nm were measured. The experimental results were processed and analyzed using a very simple thermal resistance model, which must be eventually improved and perfected using simultaneous three-dimensional electrical and heat transfer numerical simulations. However, the preliminary results revealed several important trends indicating the prevalence of localized heating or sub-continuum transport phenomena in the vicinity of a hotspot at low temperatures.

Original languageEnglish
Title of host publication2008 11th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, I-THERM
Pages925-930
Number of pages6
DOIs
StatePublished - 2008
Event2008 11th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, I-THERM - Orlando,FL, United States
Duration: May 28 2008May 31 2008

Publication series

Name2008 11th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, I-THERM

Conference

Conference2008 11th IEEE Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems, I-THERM
Country/TerritoryUnited States
CityOrlando,FL
Period05/28/0805/31/08

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