TY - GEN
T1 - Free Vibration Analysis for Thin Wire of Modern Wiresaw between Sliced Wafers in Wafer Manufacturing Processes
AU - Wei, Songbin
AU - Kao, Imin
N1 - Publisher Copyright:
© 2000 by ASME.
PY - 2000
Y1 - 2000
N2 - In wiresaw manufacturing process where thin wire moving at high speed is pushed onto ingot to produce slices of wafer, the wire is constrained by two wafer walls as it slices into the ingot. In this paper, we investigate the vibration of such wire under the constraints of wafer walls. To address this problem, the model for wire vibration with impact to wafer walls is developed. The equation of motion is discretized using the Galerkin's method. The principle of impulse and momentum is utilized to solve the impact problem. The results of analysis and simulation indicate that the response under a pointwise sinusoidal excitation is neither periodical nor symmetric with respect to the horizontal axis, due to the excitation from the impact. The wire vibration behavior is affected dramatically by the wafer wall constraints.
AB - In wiresaw manufacturing process where thin wire moving at high speed is pushed onto ingot to produce slices of wafer, the wire is constrained by two wafer walls as it slices into the ingot. In this paper, we investigate the vibration of such wire under the constraints of wafer walls. To address this problem, the model for wire vibration with impact to wafer walls is developed. The equation of motion is discretized using the Galerkin's method. The principle of impulse and momentum is utilized to solve the impact problem. The results of analysis and simulation indicate that the response under a pointwise sinusoidal excitation is neither periodical nor symmetric with respect to the horizontal axis, due to the excitation from the impact. The wire vibration behavior is affected dramatically by the wafer wall constraints.
UR - https://www.scopus.com/pages/publications/85120431130
U2 - 10.1115/IMECE2000-2273
DO - 10.1115/IMECE2000-2273
M3 - Conference contribution
AN - SCOPUS:85120431130
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
SP - 213
EP - 219
BT - Packaging of Electronic and Photonic Devices
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 2000 International Mechanical Engineering Congress and Exposition, IMECE 2000
Y2 - 5 November 2000 through 10 November 2000
ER -