@inproceedings{3e32fb5f8726455a8a51e8295b6870f4,
title = "High-resolution topography analysis on threading edge dislocations in 4H-SiC epilayers",
abstract = "Threading edge dislocations (TEDs) in a 4H-SiC epitaxial layer are investigated using high-resolution synchrotron topography. Six types of TED image are confirmed to correspond to the Burgers vector directions by a comparison of computer simulated images and observed topography images in crystal boundaries. Using a mapping method, a wide spatial distribution of the six types of TED is examined in a quarter section of a 2-inch wafer.",
keywords = "Dislocations, Edge dislocations, TED, Topography",
author = "I. Kamata and M. Nagano and H. Tsuchida and Yi Chen and M. Dudley",
year = "2009",
doi = "10.4028/www.scientific.net/msf.600-603.305",
language = "English",
isbn = "9780878493579",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "305--308",
editor = "Akira Suzuki and Hajime Okumura and Kenji Fukuda and Shin-ichi Nishizawa and Tsunenobu Kimoto and Takashi Fuyuki",
booktitle = "Silicon Carbide and Related Materials 2007",
note = "12th International Conference on Silicon Carbide and Related Materials, ICSCRM 2007 ; Conference date: 14-10-2007 Through 19-10-2007",
}