@inproceedings{89fc864473324e23907a572846990bf7,
title = "High throughput laser assisted near-field nanomanufacturing",
abstract = "Near field nanomanufacturing can break the diffraction limitation and generate features at nanoscale. However, current near field nanomanufacturing suffers from the low throughput and hinders its practical applications. In this paper, we are presenting a new approach of adopting a near-field lens array and generate an array of features with nanoscale resolution.",
author = "Heng Pan and David Hwang and Ko, \{Seung H.\} and Grigoropoulos, \{Costas P.\}",
year = "2009",
doi = "10.2351/1.5061492",
language = "English",
isbn = "9780912035598",
series = "ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings",
publisher = "Laser Institute of America",
pages = "1315--1318",
booktitle = "ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings",
note = "28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009 ; Conference date: 02-11-2009 Through 05-11-2009",
}