TY - GEN
T1 - Laser-Assisted on demand growth of semiconducting nanowires
AU - Ryu, Sang Gil
AU - Hwang, David J.
AU - Kim, Eunpa
AU - Yoo, Jae Hyuck
AU - Grigoropoulos, Costas P.
PY - 2013
Y1 - 2013
N2 - We present laser-Assisted direct synthesis of nanowires with site-, composition-, and shape-selectivity on a single substrate by employing a spatially confined laser heat source. Laser-Assisted nanowire growth based on vapor-liquid-solid mechanism is conveniently studied with multiple growth parameters such as temperature, time, and illumination direction. On-demand direct integration of silicon and germanium nanowires are demonstrated in a hetero-Array configuration by simply switching the reactant gases as the growth of nanowires is limited within the heat-Affected zone induced by the laser. Since laser-induced local temperature field is able to drive the individual growth, each germanium nanowire is successfully synthesized with distinctively different geometric features from cylindrical to hexagonal pyramid shape. By regularly patterning gold catalysts prepared by electron beam lithography on Si(111), especially, we accomplished site- And shape-selective direct integration of germanium nanowires on a single substrate in vertical architecture. Considering that blanket furnace heating only produce nanowires with uniform size and shape, therefore, our work shows a route toward the facile fabrication of multifunctional nanowire based devices.
AB - We present laser-Assisted direct synthesis of nanowires with site-, composition-, and shape-selectivity on a single substrate by employing a spatially confined laser heat source. Laser-Assisted nanowire growth based on vapor-liquid-solid mechanism is conveniently studied with multiple growth parameters such as temperature, time, and illumination direction. On-demand direct integration of silicon and germanium nanowires are demonstrated in a hetero-Array configuration by simply switching the reactant gases as the growth of nanowires is limited within the heat-Affected zone induced by the laser. Since laser-induced local temperature field is able to drive the individual growth, each germanium nanowire is successfully synthesized with distinctively different geometric features from cylindrical to hexagonal pyramid shape. By regularly patterning gold catalysts prepared by electron beam lithography on Si(111), especially, we accomplished site- And shape-selective direct integration of germanium nanowires on a single substrate in vertical architecture. Considering that blanket furnace heating only produce nanowires with uniform size and shape, therefore, our work shows a route toward the facile fabrication of multifunctional nanowire based devices.
UR - https://www.scopus.com/pages/publications/84903449180
U2 - 10.1115/IMECE2013-65696
DO - 10.1115/IMECE2013-65696
M3 - Conference contribution
AN - SCOPUS:84903449180
SN - 9780791856192
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
BT - Advanced Manufacturing
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 2013 International Mechanical Engineering Congress and Exposition, IMECE 2013
Y2 - 15 November 2013 through 21 November 2013
ER -