Measuring the thickness of ultra-thin film layers using terahertz time-domain polarimetry (THz-TDP)

Elyas Bayati; Dale P. Winebrenner; M. Hassan Arbab

doi:10.1109/IRMMW-THz.2017.8067109

Measuring the thickness of ultra-thin film layers using terahertz time-domain polarimetry (THz-TDP)

Elyas Bayati
, Dale P. Winebrenner
, M. Hassan Arbab

Biomedical Engineering

University of Washington

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

We present experimental results from the application of our new terahertz full-polarimetry instrument, to measuring the thickness of ultra-thin films in a multi-layer coating system. While the standard time-of-flight measurement is limited by the bandwidth of the THz pulse in the minimum thickness resolution of the film that can be resolved using a time-domain system, the new terahertz time-domain polarimetry (THz-TDP) instrument can extend this limit to a few micrometers. This unique ability to measure the thickness of ultra-thin films (approximately λ/1000) is due to the accuracy of THz-TDP to resolve the polarization direction of the THz field within 1 degrees.

Original language	English
Title of host publication	2017 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017
Publisher	IEEE Computer Society
ISBN (Electronic)	9781509060481
DOIs	https://doi.org/10.1109/IRMMW-THz.2017.8067109
State	Published - Oct 12 2017
Event	42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017 - Cancun, Quintana Roo, Mexico Duration: Aug 27 2017 → Sep 1 2017

Publication series

Name	International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
ISSN (Print)	2162-2027
ISSN (Electronic)	2162-2035

Conference

Conference	42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017
Country/Territory	Mexico
City	Cancun, Quintana Roo
Period	08/27/17 → 09/1/17

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10.1109/IRMMW-THz.2017.8067109

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Bayati, E., Winebrenner, D. P., & Arbab, M. H. (2017). Measuring the thickness of ultra-thin film layers using terahertz time-domain polarimetry (THz-TDP). In 2017 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017 Article 8067109 (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz). IEEE Computer Society. https://doi.org/10.1109/IRMMW-THz.2017.8067109

Bayati, Elyas ; Winebrenner, Dale P. ; Arbab, M. Hassan. / Measuring the thickness of ultra-thin film layers using terahertz time-domain polarimetry (THz-TDP). 2017 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017. IEEE Computer Society, 2017. (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz).

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title = "Measuring the thickness of ultra-thin film layers using terahertz time-domain polarimetry (THz-TDP)",

abstract = "We present experimental results from the application of our new terahertz full-polarimetry instrument, to measuring the thickness of ultra-thin films in a multi-layer coating system. While the standard time-of-flight measurement is limited by the bandwidth of the THz pulse in the minimum thickness resolution of the film that can be resolved using a time-domain system, the new terahertz time-domain polarimetry (THz-TDP) instrument can extend this limit to a few micrometers. This unique ability to measure the thickness of ultra-thin films (approximately λ/1000) is due to the accuracy of THz-TDP to resolve the polarization direction of the THz field within 1 degrees.",

author = "Elyas Bayati and Winebrenner, \{Dale P.\} and Arbab, \{M. Hassan\}",

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language = "English",

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Bayati, E, Winebrenner, DP & Arbab, MH 2017, Measuring the thickness of ultra-thin film layers using terahertz time-domain polarimetry (THz-TDP). in 2017 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017., 8067109, International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, IEEE Computer Society, 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017, Cancun, Quintana Roo, Mexico, 08/27/17. https://doi.org/10.1109/IRMMW-THz.2017.8067109

Measuring the thickness of ultra-thin film layers using terahertz time-domain polarimetry (THz-TDP). / Bayati, Elyas; Winebrenner, Dale P.; Arbab, M. Hassan.
2017 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017. IEEE Computer Society, 2017. 8067109 (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Measuring the thickness of ultra-thin film layers using terahertz time-domain polarimetry (THz-TDP)

AU - Bayati, Elyas

AU - Winebrenner, Dale P.

AU - Arbab, M. Hassan

PY - 2017/10/12

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N2 - We present experimental results from the application of our new terahertz full-polarimetry instrument, to measuring the thickness of ultra-thin films in a multi-layer coating system. While the standard time-of-flight measurement is limited by the bandwidth of the THz pulse in the minimum thickness resolution of the film that can be resolved using a time-domain system, the new terahertz time-domain polarimetry (THz-TDP) instrument can extend this limit to a few micrometers. This unique ability to measure the thickness of ultra-thin films (approximately λ/1000) is due to the accuracy of THz-TDP to resolve the polarization direction of the THz field within 1 degrees.

AB - We present experimental results from the application of our new terahertz full-polarimetry instrument, to measuring the thickness of ultra-thin films in a multi-layer coating system. While the standard time-of-flight measurement is limited by the bandwidth of the THz pulse in the minimum thickness resolution of the film that can be resolved using a time-domain system, the new terahertz time-domain polarimetry (THz-TDP) instrument can extend this limit to a few micrometers. This unique ability to measure the thickness of ultra-thin films (approximately λ/1000) is due to the accuracy of THz-TDP to resolve the polarization direction of the THz field within 1 degrees.

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M3 - Conference contribution

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Bayati E, Winebrenner DP, Arbab MH. Measuring the thickness of ultra-thin film layers using terahertz time-domain polarimetry (THz-TDP). In 2017 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2017. IEEE Computer Society. 2017. 8067109. (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz). doi: 10.1109/IRMMW-THz.2017.8067109

Measuring the thickness of ultra-thin film layers using terahertz time-domain polarimetry (THz-TDP)

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