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Microfluidic Cooling for 3D-IC with 3D Printing Package

  • University of Virginia

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

Microchannel cooling method for stacked 3D-IC has process and cost issues. The proposed method, the thermal fluid chamber, exploits the gap between the upper and lower stacks. The method advantages are achieving controllable coolant flow and low-cost process. The microfluidic cooling system is composed of a thermal test chip, thermal test board, 3D printing package, and microfluidic apparatus. The thermal test chip with C4 micro-bumps is attached on the test board. The thermal generator and sensor in the chip are operated by the test board. The microfluidic chamber of 68 μm thick is integrated between the chip and board. Thermal sensing and microfluidic tests demonstrate the validity of the thermal fluidic chamber.

Original languageEnglish
Title of host publication2019 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728135236
DOIs
StatePublished - Oct 14 2019
Event2019 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2019 - San Jose, United States
Duration: Oct 14 2019Oct 17 2019

Publication series

Name2019 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2019

Conference

Conference2019 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2019
Country/TerritoryUnited States
CitySan Jose
Period10/14/1910/17/19

Keywords

  • 3D-IC
  • 3D-printing
  • cooling
  • IC package
  • microchannel

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