M3: Microscope-based maskless micropatterning with dry film photoresist

Steven Y. Leigh; Aashay Tattu; Joseph S.B. Mitchell; Emilia Entcheva

doi:10.1007/s10544-010-9506-2

M³: Microscope-based maskless micropatterning with dry film photoresist

Steven Y. Leigh
, Aashay Tattu
, Joseph S.B. Mitchell
, Emilia Entcheva

Applied Mathematics and Statistics

Stony Brook University

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

We present a maskless micropatterning system that utilizes a fluorescence microscope with programmable X-Y stage and dry film photoresist to realize feature sizes in the sub-millimeter range (40-700 μThe method allows for flexible in-house maskless photolithography without a dedicated microfabrication facility and is well-suited for rapid prototyping of microfluidic channels, scaffold templates for protein/cell patterning or optically-guided cell encapsulation for biomedical applications.

Original language	English
Pages (from-to)	375-381
Number of pages	7
Journal	Biomedical Microdevices
Volume	13
Issue number	2
DOIs	https://doi.org/10.1007/s10544-010-9506-2
State	Published - Apr 2011

Keywords

Cell patterning
Dry film photoresist
Maskless photolithography
Microfluidics

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Cite this

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title = "M3: Microscope-based maskless micropatterning with dry film photoresist",

abstract = "We present a maskless micropatterning system that utilizes a fluorescence microscope with programmable X-Y stage and dry film photoresist to realize feature sizes in the sub-millimeter range (40-700 μThe method allows for flexible in-house maskless photolithography without a dedicated microfabrication facility and is well-suited for rapid prototyping of microfluidic channels, scaffold templates for protein/cell patterning or optically-guided cell encapsulation for biomedical applications.",

keywords = "Cell patterning, Dry film photoresist, Maskless photolithography, Microfluidics",

author = "Leigh, \{Steven Y.\} and Aashay Tattu and Mitchell, \{Joseph S.B.\} and Emilia Entcheva",

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AU - Leigh, Steven Y.

AU - Tattu, Aashay

AU - Mitchell, Joseph S.B.

AU - Entcheva, Emilia

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N2 - We present a maskless micropatterning system that utilizes a fluorescence microscope with programmable X-Y stage and dry film photoresist to realize feature sizes in the sub-millimeter range (40-700 μThe method allows for flexible in-house maskless photolithography without a dedicated microfabrication facility and is well-suited for rapid prototyping of microfluidic channels, scaffold templates for protein/cell patterning or optically-guided cell encapsulation for biomedical applications.

AB - We present a maskless micropatterning system that utilizes a fluorescence microscope with programmable X-Y stage and dry film photoresist to realize feature sizes in the sub-millimeter range (40-700 μThe method allows for flexible in-house maskless photolithography without a dedicated microfabrication facility and is well-suited for rapid prototyping of microfluidic channels, scaffold templates for protein/cell patterning or optically-guided cell encapsulation for biomedical applications.

KW - Cell patterning

KW - Dry film photoresist

KW - Maskless photolithography

KW - Microfluidics

UR - https://www.scopus.com/pages/publications/79958144991

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DO - 10.1007/s10544-010-9506-2

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IS - 2

ER -

M³: Microscope-based maskless micropatterning with dry film photoresist

Abstract

Keywords

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