Abstract
High resistivity FZ silicon diodes have been processed in order to increase their oxygen dimer (O2i) concentration. Deep level transient spectroscopy (DLTS) measurements have been performed after proton irradiation showing that the formation of the VO centre is suppressed. The substrates had a starting resistivity of 2-4 kΩ cm, with an oxygen concentration of 1015-1017 cm-3. This new material has potential applications in very high radiation environments such as particle detectors in future particle physics experiments.
| Original language | English |
|---|---|
| Pages (from-to) | 111-115 |
| Number of pages | 5 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 186 |
| Issue number | 1-4 |
| DOIs | |
| State | Published - Jan 2002 |
Keywords
- DLTS
- Oxygen
- Oxygen dimer
- Silicon detector
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