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Observations on the mechanics of strained epitaxial island growth

  • Brown University

Research output: Contribution to journalConference articlepeer-review

10 Scopus citations

Abstract

An epitaxial material island which has a lattice parameter differing by a small amount for that of its substrate is considered within the framework of continuum mechanics. The strain distribution in the island is determined for a range of aspect ratio, taking into account the compliance of the substrate. It is demonstrated that the total free energy of a strained island is minimum for some value of aspect ratio, and that this value depends on the volume of the island. To consider strain relaxation, the nucleation of a dislocation at the edge of a strained island is examined and the equilibrium aspect ratio of a dislocated island is computed. In particular, it is shown that an island can reduce its free energy by reducing its aspect ratio and, simultaneously, forming an interface misfit dislocation. The simulations are based on the numerical finite element method.

Original languageEnglish
Pages (from-to)359-370
Number of pages12
JournalMaterials Research Society Symposium - Proceedings
Volume399
StatePublished - 1996
EventProceedings of the 1995 MRS Fall Meeting - Boston, MA, USA
Duration: Nov 27 1995Dec 1 1995

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