TY - GEN
T1 - Planar off-chip microelectrode for the electrophysiological measurement of small biological cells
AU - Park, Inkyu
AU - Hwang, David J.
AU - Pisano, Albert P.
AU - Grigoropoulos, Costas P.
PY - 2005
Y1 - 2005
N2 - We have developed a planar, off-chip microelectrode with a very sharp tip (400 nm tip end width) for the measurement of biological cell membrane potentials. The electrode consists of a tungsten electrode on the silicon dioxide support structure, a parylene-N conformal coating for electrical insulation, and a silicon base to facilitate mounting of the probe on the end effector of a micromanipulator. The parylene-N layer at the end of microelectrode tip is opened to allow electrical communication between the biological cell and the tungsten electrode by femtosecond laser ablation.
AB - We have developed a planar, off-chip microelectrode with a very sharp tip (400 nm tip end width) for the measurement of biological cell membrane potentials. The electrode consists of a tungsten electrode on the silicon dioxide support structure, a parylene-N conformal coating for electrical insulation, and a silicon base to facilitate mounting of the probe on the end effector of a micromanipulator. The parylene-N layer at the end of microelectrode tip is opened to allow electrical communication between the biological cell and the tungsten electrode by femtosecond laser ablation.
UR - https://www.scopus.com/pages/publications/33845317923
U2 - 10.1109/MMB.2005.1548428
DO - 10.1109/MMB.2005.1548428
M3 - Conference contribution
AN - SCOPUS:33845317923
SN - 0780387112
SN - 9780780387119
T3 - 2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology
SP - 207
EP - 210
BT - 2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology
T2 - 2005 3rd IEEE/EMBS Special Topic Conference on Microtechnology in Medicine and Biology
Y2 - 12 May 2005 through 15 May 2005
ER -