Plasma-sprayed thick-film anisotropic magnetoresistive (AMR) sensors

Richard J. Gambino; Muthuvel Manivel Raja; Sanjay Sampath; Robert Greenlaw

doi:10.1109/JSEN.2004.836866

Plasma-sprayed thick-film anisotropic magnetoresistive (AMR) sensors

Richard J. Gambino
, Muthuvel Manivel Raja
, Sanjay Sampath
, Robert Greenlaw

Materials Science and Engineering

Stony Brook University
Integrated Coating Solutions, Inc.

Research output: Contribution to journal › Article › peer-review

24 Scopus citations

Abstract

We report our recent work on thick-film permalloy (NiFe) and NiCo-alloy anisotropic magnetoresistive (AMR) sensors made by thermal spray. Various sensor layouts have been fabricated and characterized. The AMR effect of 2.45% and 2.68% is obtained in as-sprayed permalloy and NiCo-alloy sensors. Resistivity of thermal-sprayed thick film is 40-60 μΩ cm, which is higher than bulk material. A maximum ΔR/R value of 5.2% is achieved after thermal annealing. A high-ΔR/R value and low-saturation fields are the important features of thermal spray sensors. The very promising results demonstrate the potential applications of thermal spray sensors.

Original language	English
Pages (from-to)	764-767
Number of pages	4
Journal	IEEE Sensors Journal
Volume	4
Issue number	6
DOIs	https://doi.org/10.1109/JSEN.2004.836866
State	Published - Dec 2004

Keywords

NiFe and NiCo alloys
Plasma spray
Thick-film magnetoresistive (MR) sensor

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10.1109/JSEN.2004.836866

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title = "Plasma-sprayed thick-film anisotropic magnetoresistive (AMR) sensors",

abstract = "We report our recent work on thick-film permalloy (NiFe) and NiCo-alloy anisotropic magnetoresistive (AMR) sensors made by thermal spray. Various sensor layouts have been fabricated and characterized. The AMR effect of 2.45\% and 2.68\% is obtained in as-sprayed permalloy and NiCo-alloy sensors. Resistivity of thermal-sprayed thick film is 40-60 μΩ cm, which is higher than bulk material. A maximum ΔR/R value of 5.2\% is achieved after thermal annealing. A high-ΔR/R value and low-saturation fields are the important features of thermal spray sensors. The very promising results demonstrate the potential applications of thermal spray sensors.",

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author = "Gambino, \{Richard J.\} and Raja, \{Muthuvel Manivel\} and Sanjay Sampath and Robert Greenlaw",

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AU - Gambino, Richard J.

AU - Raja, Muthuvel Manivel

AU - Sampath, Sanjay

AU - Greenlaw, Robert

PY - 2004/12

Y1 - 2004/12

N2 - We report our recent work on thick-film permalloy (NiFe) and NiCo-alloy anisotropic magnetoresistive (AMR) sensors made by thermal spray. Various sensor layouts have been fabricated and characterized. The AMR effect of 2.45% and 2.68% is obtained in as-sprayed permalloy and NiCo-alloy sensors. Resistivity of thermal-sprayed thick film is 40-60 μΩ cm, which is higher than bulk material. A maximum ΔR/R value of 5.2% is achieved after thermal annealing. A high-ΔR/R value and low-saturation fields are the important features of thermal spray sensors. The very promising results demonstrate the potential applications of thermal spray sensors.

AB - We report our recent work on thick-film permalloy (NiFe) and NiCo-alloy anisotropic magnetoresistive (AMR) sensors made by thermal spray. Various sensor layouts have been fabricated and characterized. The AMR effect of 2.45% and 2.68% is obtained in as-sprayed permalloy and NiCo-alloy sensors. Resistivity of thermal-sprayed thick film is 40-60 μΩ cm, which is higher than bulk material. A maximum ΔR/R value of 5.2% is achieved after thermal annealing. A high-ΔR/R value and low-saturation fields are the important features of thermal spray sensors. The very promising results demonstrate the potential applications of thermal spray sensors.

KW - NiFe and NiCo alloys

KW - Plasma spray

KW - Thick-film magnetoresistive (MR) sensor

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DO - 10.1109/JSEN.2004.836866

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EP - 767

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

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ER -

Plasma-sprayed thick-film anisotropic magnetoresistive (AMR) sensors

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Keywords

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