Abstract
We report our recent work on thick film permalloy (NiFe) and NiCo alloy anisotropic magnetoresistive sensors made by thermal spray. Various sensor layouts have been fabricated and characterized. The AMR effect of 2.45% and 2.68% is obtained in as-sprayed permalloy and NiCo alloy sensors. Resistivity of thermal sprayed thick film is 40 -60 μΩ-cm, which is higher than bulk material. A maximum AR/R value of 5.2 % is achieved after thermal annealing. A high ΔR/R value and low saturation fields are the important features of thermal spray sensors. The very promising results demonstrate the potential applications of thermal spray sensors.
| Original language | English |
|---|---|
| Pages | 656-659 |
| Number of pages | 4 |
| State | Published - 2002 |
| Event | First IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL, United States Duration: Jun 12 2002 → Jun 14 2002 |
Conference
| Conference | First IEEE International Conference on Sensors - IEEE Sensors 2002 |
|---|---|
| Country/Territory | United States |
| City | Orlando, FL |
| Period | 06/12/02 → 06/14/02 |
Keywords
- NiFe and NiCo alloys
- Plasma spray
- Thick film MR sensor
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