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Post-growth micropipe formation in 4H-SiC

  • Dow Chemical
  • Stony Brook University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

Understanding the growth and propagation of defects in SiC remains of interest in an effort to continue to improve device performance. A post-growth boule heat-treatment revealed to form micropipe pairs from apparent single screw dislocations is reviewed. In the treated samples almost no 1c threading screw dislocations were found. Instead, micropipe pairs were observed in similar densities to 1c threading screw dislocations in non-heat treated samples. It is hypothesized that the elevated temperatures allowed for enhanced dislocation mobility, enabling the transition.

Original languageEnglish
Title of host publicationSilicon Carbide and Related Materials 2015
EditorsFabrizio Roccaforte, Filippo Giannazzo, Francesco La Via, Roberta Nipoti, Danilo Crippa, Mario Saggio
PublisherTrans Tech Publications Ltd
Pages367-370
Number of pages4
ISBN (Print)9783035710427
DOIs
StatePublished - 2016
Event16th International Conference on Silicon Carbide and Related Materials, ICSCRM 2015 - Sicily, Italy
Duration: Oct 4 2015Oct 9 2015

Publication series

NameMaterials Science Forum
Volume858
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Conference

Conference16th International Conference on Silicon Carbide and Related Materials, ICSCRM 2015
Country/TerritoryItaly
CitySicily
Period10/4/1510/9/15

Keywords

  • 4H silicon carbide
  • Defects
  • Dislocation
  • Micropipe
  • Threading screw dislocation

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