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Rapid transfer-based micropatterning and dry etching of silk microstructures

  • Konstantinos Tsioris
  • , Hu Tao
  • , Mengkun Liu
  • , Jeffrey A. Hopwood
  • , David L. Kaplan
  • , Richard D. Averitt
  • , Fiorenzo G. Omenetto
  • Tufts University
  • Boston University

Research output: Contribution to journalArticlepeer-review

52 Scopus citations

Abstract

The silk transfer applied micropatterning (STAMP) method enables patterning of large area silk fibroin protein films with metallic microfabricated features. All processing is performed under ambient conditions in an aqueous environment. The micropatterns fabricated enable masking of biopolymer films for dry etching to produce protein-based metamaterial structures.

Original languageEnglish
Pages (from-to)2015-2019
Number of pages5
JournalAdvanced Materials
Volume23
Issue number17
DOIs
StatePublished - May 3 2011

Keywords

  • biopolymers
  • metamaterials
  • microfabrication
  • reactive ion etching
  • silk

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