Recent developments and future perspectives in 3D silicon radiation sensors

G. F. Dalla Betta; C. Da Via; M. Povoli; S. Parker; M. Boscardin; G. Darbo; S. Grinstein; P. Grenier; J. Hasi; C. Kenney; A. Kok; C. H. Lai; G. Pellegrini; S. Watts

doi:10.1088/1748-0221/7/10/C10006

Recent developments and future perspectives in 3D silicon radiation sensors

G. F. Dalla Betta
, C. Da Via
, M. Povoli
, S. Parker
, M. Boscardin
, G. Darbo
, S. Grinstein
, P. Grenier
, J. Hasi
, C. Kenney
, A. Kok
, C. H. Lai
, G. Pellegrini
, S. Watts

Physics and Astronomy

University of Trento
Lawrence Berkeley National Laboratory
Fondazione Bruno Kessler
National Institute for Nuclear Physics
Autonomous University of Barcelona
SLAC National Accelerator Laboratory
SINTEF
University of Manchester
Centro Nacional de Microelectrónica (IMB-CNM-CSIC)

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

In this paper we report on the most recent achievements of the ATLAS 3D Sensors Collaboration in the development of silicon 3D sensors. Results from 3D pixels production for the ATLAS Insertable B-Layer (IBL) are presented, showing the high quality and good process reproducibility of the technology. In view of the future detector upgrades at the LHC, a new generation of 3D pixel sensors will be developed. This will require some new ideas and the solution of technological challenges. Both will briefly be addressed in this paper.

Original language	English
Article number	C10006
Journal	Journal of Instrumentation
Volume	7
Issue number	10
DOIs	https://doi.org/10.1088/1748-0221/7/10/C10006
State	Published - Oct 2012

Keywords

Detector modelling and simulations II (electric fields, charge transport, multiplication and induction, pulse formation, electron emission,etc)
Particle tracking detectors (Solid-state detectors)
Radiation-hard detectors
Solid state detectors

Access to Document

10.1088/1748-0221/7/10/C10006

Cite this

@article{a306561eebc94518b0e53107dee84d77,

title = "Recent developments and future perspectives in 3D silicon radiation sensors",

abstract = "In this paper we report on the most recent achievements of the ATLAS 3D Sensors Collaboration in the development of silicon 3D sensors. Results from 3D pixels production for the ATLAS Insertable B-Layer (IBL) are presented, showing the high quality and good process reproducibility of the technology. In view of the future detector upgrades at the LHC, a new generation of 3D pixel sensors will be developed. This will require some new ideas and the solution of technological challenges. Both will briefly be addressed in this paper.",

keywords = "Detector modelling and simulations II (electric fields, charge transport, multiplication and induction, pulse formation, electron emission,etc), Particle tracking detectors (Solid-state detectors), Radiation-hard detectors, Solid state detectors",

author = "\{Dalla Betta\}, \{G. F.\} and \{Da Via\}, C. and M. Povoli and S. Parker and M. Boscardin and G. Darbo and S. Grinstein and P. Grenier and J. Hasi and C. Kenney and A. Kok and Lai, \{C. H.\} and G. Pellegrini and S. Watts",

year = "2012",

month = oct,

doi = "10.1088/1748-0221/7/10/C10006",

language = "English",

volume = "7",

journal = "Journal of Instrumentation",

issn = "1748-0221",

number = "10",

}

TY - JOUR

T1 - Recent developments and future perspectives in 3D silicon radiation sensors

AU - Dalla Betta, G. F.

AU - Da Via, C.

AU - Povoli, M.

AU - Parker, S.

AU - Boscardin, M.

AU - Darbo, G.

AU - Grinstein, S.

AU - Grenier, P.

AU - Hasi, J.

AU - Kenney, C.

AU - Kok, A.

AU - Lai, C. H.

AU - Pellegrini, G.

AU - Watts, S.

PY - 2012/10

Y1 - 2012/10

N2 - In this paper we report on the most recent achievements of the ATLAS 3D Sensors Collaboration in the development of silicon 3D sensors. Results from 3D pixels production for the ATLAS Insertable B-Layer (IBL) are presented, showing the high quality and good process reproducibility of the technology. In view of the future detector upgrades at the LHC, a new generation of 3D pixel sensors will be developed. This will require some new ideas and the solution of technological challenges. Both will briefly be addressed in this paper.

AB - In this paper we report on the most recent achievements of the ATLAS 3D Sensors Collaboration in the development of silicon 3D sensors. Results from 3D pixels production for the ATLAS Insertable B-Layer (IBL) are presented, showing the high quality and good process reproducibility of the technology. In view of the future detector upgrades at the LHC, a new generation of 3D pixel sensors will be developed. This will require some new ideas and the solution of technological challenges. Both will briefly be addressed in this paper.

KW - Detector modelling and simulations II (electric fields, charge transport, multiplication and induction, pulse formation, electron emission,etc)

KW - Particle tracking detectors (Solid-state detectors)

KW - Radiation-hard detectors

KW - Solid state detectors

UR - https://www.scopus.com/pages/publications/84868231238

U2 - 10.1088/1748-0221/7/10/C10006

DO - 10.1088/1748-0221/7/10/C10006

M3 - Article

AN - SCOPUS:84868231238

SN - 1748-0221

VL - 7

JO - Journal of Instrumentation

JF - Journal of Instrumentation

IS - 10

M1 - C10006

ER -

Recent developments and future perspectives in 3D silicon radiation sensors

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this