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Self-guided glass drilling by femtosecond laser pulses

  • David J. Hwang
  • , Kuniaki Hiromatsu
  • , Hirofumi Hidai
  • , Costas P. Grigoropoulos
  • University of California at Berkeley
  • AGC Inc.
  • Institute of Science Tokyo
  • Lawrence Berkeley National Laboratory

Research output: Contribution to journalArticlepeer-review

20 Scopus citations

Abstract

Straight through-holes of high aspect ratio have been fabricated in glass by femtosecond laser pulses, utilizing unique characteristics of ultrafast lasers such as volumetric multi-photon absorption and nonlinear self-focusing. In this study, interestingly, the drilling process was initiated and progressed in a self-regulated manner, while the laser focus was fixed through the specimen at the neighborhood of the rear surface that was in contact with liquid during the entire drilling process. The deposition of laser energy along the nonlinearly extended focal range and the guided drilling along the pre-defined region are explained based on time-resolved optical transmission and emission measurements.

Original languageEnglish
Pages (from-to)555-558
Number of pages4
JournalApplied Physics A Materials Science & Processing
Volume94
Issue number3
DOIs
StatePublished - Mar 2009

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