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Sense determination of micropipes via grazing-incidence synchrotron white beam x-ray topography in 4H silicon carbide

  • Y. Chen
  • , G. Dhanaraj
  • , M. Dudley
  • , E. K. Sanchez
  • , M. F. MacMillan
  • Stony Brook University
  • Dow Chemical

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Abstract

Computer modeling using the ray-tracing method has been used to simulate the grazing-incidence x-ray topographic images of micropipes in 4H silicon carbide recorded using the pyramidal (11-28) reflection. Simulation results indicate that the images of micropipes appear as white features of roughly elliptical shape, canted to one side or other of the g vector depending on the dislocation sense. Observed images compare well with the simulations, demonstrating that the direction of cant provides a simple, nondestructive, and reliable way to reveal the senses of micropipes. Sense assignment has been validated using back-reflection reticulography.

Original languageEnglish
Article number071917
JournalApplied Physics Letters
Volume91
Issue number7
DOIs
StatePublished - 2007

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