@inproceedings{c31a14e52f654f7fad3417e26de49803,
title = "Spatially Resolved Spectroscopy for Electron Beam Patterned Metal-Organic-Based Materials",
abstract = "Spatially resolved spectroscopy was used to determine spectroscopic signatures of electron beam induced changes in a metal-organic framework called Zeolitic Imidazolate Framework (ZIF)-L. Investigation of the structural changes caused by e-beam treatment were then used to develop a process for pattern development. ZIF-L exhibits dual-tone behavior depending on the choice of solvent, producing both negative and positive tone patterns.",
keywords = "Electron Beam Lithography, Metal Organic Frameworks, Metal Organic Resist, Nano-IR, Negative-Tone, Positive-Tone, Spectroscopy, Zeolitic Imidazolate Frameworks",
author = "Andrea Kraetz and Yurun Miao and Waltz, \{Kayley E.\} and Prerna Prerna and Mueed Ahmad and Boscoboinik, \{J. Anibal\} and Siepman, \{J. Ilja\} and Samuel Tenney and Michael Tsapatsis",
note = "Publisher Copyright: {\textcopyright} 2025 SPIE.; Advances in Patterning Materials and Processes XLII ; Conference date: 24-02-2025 Through 27-02-2025",
year = "2025",
doi = "10.1117/12.3051224",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Ryan Callahan and \{De Silva\}, Anuja",
booktitle = "Advances in Patterning Materials and Processes XLII",
}