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Synthesis of nanoporous GaN crystalline particles by chemical vapor deposition

  • Joan J. Carvajal
  • , Nadia Gomez
  • , Jie Bai
  • , Michael Dudley
  • , J. Carlos Rojo
  • Stony Brook University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

Nanoporous, micron-size GaN particles with pores between 40 and 100 nm in diameter have been synthesized on boron nitride (BN) substrates using chemical vapor deposition (CVD) techniques. The synthesis process is based on the direct reaction of gallium atoms and ammonia molecules without the presence of intentional metal catalysts. Scanning electron micrographs reveal the formation of GaN nanoporous morphologies ranging from micron-size particles with hexagonal pyramidal prismatic shape to hexagonal platelets. The nanopores are only observed on the (0001) basal plane and aligned orderly along the [0001] crystallographic direction. High-Resolution Transmission Electron Microscopy (HRTEM) confirms that the nanoporous particles are, where analyzed, wurtzite GaN single crystal.

Original languageEnglish
Title of host publicationGallium Nitride Materials and Devices
DOIs
StatePublished - 2006
EventGallium Nitride Materials and Devices - San Jose, CA, United States
Duration: Jan 23 2006Jan 25 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6121
ISSN (Print)0277-786X

Conference

ConferenceGallium Nitride Materials and Devices
Country/TerritoryUnited States
CitySan Jose, CA
Period01/23/0601/25/06

Keywords

  • Chemical vapor deposition
  • GaN
  • Nanoporous semiconductors
  • SEM
  • TEM
  • Wide band-gap semiconductors

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