Teaching MEMS to Mechanical Engineering Students: A Paradigm Shift From Macro to Micro World

This paper presents pedagogical issues and experience in teaching the introduction to MEMS (Micro Electro-Mechanical System) course to a group of engineering students, primarily Mechanical Engineering students. The paper draws upon the author's experience in teaching the MEMS course. Since MEMS is highly inter-disciplinary, the presentation of various relevant topics in MEMS, which may or may not be familiar to a mechanical engineering student, is of critical importance. These topics vary from physics, electrochemistry, materials, and electronic engineering, to various areas in mechanical engineering. An integrated approach for the presentation of subjects, especially in design and fabrication, was found to be very helpful. Moreover, the paradigm shift from the macro world, that most students are familiar and comfortable with, to the micro world is significant and needs to be emphasized. The author found the concept of scaling law, when shifting to the micro world, to be essential in the presentation of MEMS to engineering students in order for them to comprehend the size factor in MEMS. In addition, understanding and appreciation of the strengths and limitations of MEMS are also critical in learning MEMS. Finally, a good textbook will facilitate the learning process of such vast subject. A bibliography of useful textbooks and reference books used by the author will be listed at the end of this paper.