Thermal sprayed thick-film anisotropic magnetoresistive sensors

M. Manivel Raja; Richard J. Gambino; Sanjay Sampath; Robert Greenlaw

doi:10.1109/TMAG.2004.832249

Thermal sprayed thick-film anisotropic magnetoresistive sensors

M. Manivel Raja
, Richard J. Gambino
, Sanjay Sampath
, Robert Greenlaw

Materials Science and Engineering

Stony Brook University
Inc.

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

Ni₈₀Fe₂₀ and Ni₈₀Co₂₀ alloys anisotropic magneto-resistive sensor films were deposited by plasma spray. The resistivity (ρ) of the films is determined to be 40-70 μΩ-cm in the as-sprayed state. The oxygen impurity dissolved in the metal acts as a strong scattering center and results in higher resistivity. The ρ of sensor film improves significantly with thermal annealing up to 560°C and it remains constant for further increase in temperature. The dissolved oxygen precipitates out as oxide phase during heat treatment and that reduces the scattering. The ρ values are 19 and 22 μΩcm for permalloy and NiCo alloy films, respectively, which are close to bulk values. The anisotropic magnetoresistance (AMR) effect is found to be increased by a factor of 2 in both the permalloy and the NiCo sensors. The ΔR/R values are increased from 2.0% to 4.0% and 2.6% to 5.8%, respectively, for permalloy and NiCo sensors.

Original language	English
Pages (from-to)	2685-2687
Number of pages	3
Journal	IEEE Transactions on Magnetics
Volume	40
Issue number	4 II
DOIs	https://doi.org/10.1109/TMAG.2004.832249
State	Published - Jul 2004

Keywords

Anisotropic magnetoresistance (AMR)
Electrical and magnetic properties
Plasma spray
Thick films

Access to Document

10.1109/TMAG.2004.832249

Cite this

@article{192bbbd0100841d7bb49a52581bd03e8,

title = "Thermal sprayed thick-film anisotropic magnetoresistive sensors",

abstract = "Ni80Fe20 and Ni80Co20 alloys anisotropic magneto-resistive sensor films were deposited by plasma spray. The resistivity (ρ) of the films is determined to be 40-70 μΩ-cm in the as-sprayed state. The oxygen impurity dissolved in the metal acts as a strong scattering center and results in higher resistivity. The ρ of sensor film improves significantly with thermal annealing up to 560°C and it remains constant for further increase in temperature. The dissolved oxygen precipitates out as oxide phase during heat treatment and that reduces the scattering. The ρ values are 19 and 22 μΩcm for permalloy and NiCo alloy films, respectively, which are close to bulk values. The anisotropic magnetoresistance (AMR) effect is found to be increased by a factor of 2 in both the permalloy and the NiCo sensors. The ΔR/R values are increased from 2.0\% to 4.0\% and 2.6\% to 5.8\%, respectively, for permalloy and NiCo sensors.",

keywords = "Anisotropic magnetoresistance (AMR), Electrical and magnetic properties, Plasma spray, Thick films",

author = "Raja, \{M. Manivel\} and Gambino, \{Richard J.\} and Sanjay Sampath and Robert Greenlaw",

year = "2004",

month = jul,

doi = "10.1109/TMAG.2004.832249",

language = "English",

volume = "40",

pages = "2685--2687",

journal = "IEEE Transactions on Magnetics",

issn = "0018-9464",

number = "4 II",

}

TY - JOUR

T1 - Thermal sprayed thick-film anisotropic magnetoresistive sensors

AU - Raja, M. Manivel

AU - Gambino, Richard J.

AU - Sampath, Sanjay

AU - Greenlaw, Robert

PY - 2004/7

Y1 - 2004/7

N2 - Ni80Fe20 and Ni80Co20 alloys anisotropic magneto-resistive sensor films were deposited by plasma spray. The resistivity (ρ) of the films is determined to be 40-70 μΩ-cm in the as-sprayed state. The oxygen impurity dissolved in the metal acts as a strong scattering center and results in higher resistivity. The ρ of sensor film improves significantly with thermal annealing up to 560°C and it remains constant for further increase in temperature. The dissolved oxygen precipitates out as oxide phase during heat treatment and that reduces the scattering. The ρ values are 19 and 22 μΩcm for permalloy and NiCo alloy films, respectively, which are close to bulk values. The anisotropic magnetoresistance (AMR) effect is found to be increased by a factor of 2 in both the permalloy and the NiCo sensors. The ΔR/R values are increased from 2.0% to 4.0% and 2.6% to 5.8%, respectively, for permalloy and NiCo sensors.

AB - Ni80Fe20 and Ni80Co20 alloys anisotropic magneto-resistive sensor films were deposited by plasma spray. The resistivity (ρ) of the films is determined to be 40-70 μΩ-cm in the as-sprayed state. The oxygen impurity dissolved in the metal acts as a strong scattering center and results in higher resistivity. The ρ of sensor film improves significantly with thermal annealing up to 560°C and it remains constant for further increase in temperature. The dissolved oxygen precipitates out as oxide phase during heat treatment and that reduces the scattering. The ρ values are 19 and 22 μΩcm for permalloy and NiCo alloy films, respectively, which are close to bulk values. The anisotropic magnetoresistance (AMR) effect is found to be increased by a factor of 2 in both the permalloy and the NiCo sensors. The ΔR/R values are increased from 2.0% to 4.0% and 2.6% to 5.8%, respectively, for permalloy and NiCo sensors.

KW - Anisotropic magnetoresistance (AMR)

KW - Electrical and magnetic properties

KW - Plasma spray

KW - Thick films

UR - https://www.scopus.com/pages/publications/4444331983

U2 - 10.1109/TMAG.2004.832249

DO - 10.1109/TMAG.2004.832249

M3 - Article

AN - SCOPUS:4444331983

SN - 0018-9464

VL - 40

SP - 2685

EP - 2687

JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

IS - 4 II

ER -

Thermal sprayed thick-film anisotropic magnetoresistive sensors

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this