Transport phenomena in microscale processing

Since the rapid increase in research in microscale devices and their operation over a decade ago, the field has expanded in a multiple of different directions and focus areas. Modern processing techniques can not only produce such devices, but often themselves rely on microscale processing techniques, e.g., ultrafast laser processing, atomic force microscopes, ultra-high-resolution thermal imaging systems, and micromachining. Along with such technological advancements, and their subsequent application, however, even more engineering problems arise that must be addressed, making for a rich and fertile research area in microscale research. This session provides a comprehensive cross-section of current research topics in the microscale area. The central theme, as the title implies, is transport phenomena on the microscale, with emphasis on processing applications. The collection of papers herein reflects the diversity of research endeavors on the microscale: topics range from atomic-level molecular dynamics simulations of thermal behavior in extremely small structures and their interfaces to multilayer structures and novel diagnostic techniques. Another central theme is the use of short-pulse, high-power lasers for diagnostics, processing, and thermal analysis. Traditional processes such as Chemical Vapor Deposition, and thermal transport in fins and composite materials have also been investigated from a microscale perspective. The boundaries of small size, fast times, and complexity of devices and their processing continue to be challenged, and this collection of papers provides an integral step in advancing this important technology.