@inproceedings{0af361ff0fed4b9c8ab0bbbdd46242f8,
title = "Using ray tracing simulations for direct determination of burgers vectors of threading mixed dislocations in 4H-SiC c-plane wafers grown by PVT method",
abstract = "The presence of threading mixed dislocations (TMDs) (with both edge and screw component) in 4H-SiC crystals grown by PVT method has been reported both from axial slices (wafers cut parallel to the growth axis) and commercial offcut wafers (cut almost perpendicular to the growth axis). In this paper, a systematic method is developed and demonstrated to unambiguously determine the Burgers vectors of TMDs in 4H-SiC commercial offcut wafers using both Synchrotron Monochromatic X-ray Topography (SMBXT) and Ray Tracing Simulations. The principle of this method is that the contrast of dislocations on different reflections varies with the relative orientation of Burgers vectors with respect to the diffraction vectors. Measurements confirm that in commercial offcut wafers the majority of the threading dislocations with screw component are mixed type dislocations.",
keywords = "Bulk growth, Physical vapor transport, Ray tracing simulation, Silicon carbide, Threading dislocations, X-ray topography",
author = "Guo, \{Jian Qiu\} and Yu Yang and Fangzhen Wu and Sumakeris, \{J. J.\} and Leonard, \{R. T.\} and Goue, \{Ouloide Y.\} and Balaji Raghothamachar and Michael Dudley",
note = "Publisher Copyright: {\textcopyright} 2016 Trans Tech Publications, Switzerland.; 16th International Conference on Silicon Carbide and Related Materials, ICSCRM 2015 ; Conference date: 04-10-2015 Through 09-10-2015",
year = "2016",
doi = "10.4028/www.scientific.net/MSF.858.15",
language = "English",
isbn = "9783035710427",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "15--18",
editor = "Fabrizio Roccaforte and Filippo Giannazzo and \{La Via\}, Francesco and Roberta Nipoti and Danilo Crippa and Mario Saggio",
booktitle = "Silicon Carbide and Related Materials 2015",
}